发明名称 LINE IMAGING SYSTEM AND LASER ANNEALING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To pass more light than a conventional line imaging system by cutting beyond a knife-edge aperture 50. <P>SOLUTION: A line imaging system includes a laser 20, first and second cylindrical optical systems CL1, CL2 that include a first spatial filter SF1 therebetween, the knife-edge aperture 50, a cylindrical relay system, and a cylindrical condenser lens CFL. The first spatial filter SF1 is configured to cut a line focus LF1 in a center lobe, and generates a first light beam. The second cylindrical lens system CL2 is arranged in a remote field, and configured to perform spatial filter processing for passing a center intensity lobe of the first light beam and cutting an intensity lobe outside a range. A light beam having been subjected to the filter processing eventually twice has a relatively tip-flat intensity distribution with respect to a length of a line image LI. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012009824(A) 申请公布日期 2012.01.12
申请号 JP20110094008 申请日期 2011.04.20
申请人 ULTRATECH INC 发明人 SERGUEI ANIKITCHEV
分类号 H01L21/268;H01L21/265;H01S3/00 主分类号 H01L21/268
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