METHOD FOR MANUFACTURING WAVELENGTH PLATE

摘要

PROBLEM TO BE SOLVED: To manufacture a wavelength plate with good durability and stability and also with high humidity resistance.

SOLUTION: A dielectric material is obliquely deposited on a substrate. A birefringence layer 14 including columnar parts 12 in which fine particles of the dielectric material are layered in a column manner and void portions 13 provided between the columnar parts 12 is formed. The birefringence layer 14 is subject to the annealing treatment at a temperature between 100°C and 300°C. An inorganic compound is formed on the birefringence layer 14 which has been subject to the annealing treatment with high density, thereby forming a protection layer 15 with low humidity permeability.

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