| 摘要 |
<P>PROBLEM TO BE SOLVED: To transmit clock data to a movable stage by radio, and to at least partially compensate for dependency of propagation delay on a length of a propagation path at this time. <P>SOLUTION: A stage device for positioning an object includes a table for holding the object and a support structure for supporting the table, wherein the table can be displaced relative to the support structure, the support structure includes at least one of a first data clock and a second data clock, and the table includes at least the other of the first data clock and second data clock and further includes a circuit for synchronizing the first data clock and second data clock with each other. The circuit includes a transmitter and a receiver, and the transmitter is configured to transmit clock signal data from the first data clock to the second data clock by radio, and further includes a synchronizing circuit for synchronizing the second data clock with the first data clock based upon the clock signal data transmitted by radio and received by the receiver. <P>COPYRIGHT: (C)2012,JPO&INPIT |
