| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface shape measuring method and a device therefor which are capable of measuring a surface shape of a measured member accurately even if there is ambient light. <P>SOLUTION: Where a column of pixels perpendicular to a longitudinal direction of a slit light image is defined as a first column in column numbers, an initial center position G0 is obtained from a brightness value of pixels within a first predetermined zone of the first column. A center position G1 of the first column is obtained from a brightness value of pixels within a second predetermined zone (reference light width) which is narrower than the first predetermined zone and has the center at the initial center position G0. For i-th column through n-th column that are the second column and thereafter, a center position Gi of the i-th column is obtained by calculating weighted average of a brightness value of pixels within the second predetermined range which has the center at a center position G(i-1) of the (i-1)-th column. Then, center positions G1 through Gn are obtained to acquire a surface shape by connecting the positions G1 through Gn. <P>COPYRIGHT: (C)2012,JPO&INPIT |
