| 摘要 |
This invention is directed to provision of a high-performance inertia sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertia sensor comprises: two dead weights (2, 3); means (C1, C2, C3, C4, +Vd, -Vd) for displacing the two dead weights in the opposite phases; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertia sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the opposite phases, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53). |
