摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric device in which the joint force between a first plate and a second plate is strong without anode joint. <P>SOLUTION: A piezoelectric device (100A) has a piezoelectric vibration piece (10) which vibrates upon application of a voltage, a first plate (11A) having a first joint face (M1) which is formed on the outer periphery of a cavity (CT) so as to form the cavity in which the piezoelectric vibration piece is mounted, and a second plate (12A) which has a second joint face (M2) formed on the outer periphery of the cavity and is joined to the first plate. A first metal film (s1), a second metal film (r1) having different metal from that of the first metal film (s1), a first metal film (s2), a glass layer (g1) formed of glass, a first metal film (s3), a second metal film (r2) and a first metal film (s4) are formed between the first joint face and the second joint face. <P>COPYRIGHT: (C)2012,JPO&INPIT |