| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pulse laser machining method enabling stable microfabrication and high-speed microfabrication of a surface of a polymeric material by carrying out raster scanning control in machining of the polymeric material using pulsed laser beam. <P>SOLUTION: In a method for machining the workpiece of the polymeric material, a clock signal is generated from a reference clock oscillator circuit, the pulsed laser beam synchronized with the clock signal is emitted from a laser oscillator, the passing and blocking of the pulsed laser beam are switched by a pulse picker in synchronization with the clock signal, a workpiece surface is scanned with the pulsed laser beam in one-dimensional direction by a laser beam scanner in synchronization with the clock signal, scanned with the pulsed laser beam in the one-dimensional direction, the workpiece is moved in a direction orthogonal to the one-dimensional direction, and the passing and blocking are switched by the laser beam scanner in synchronization with the clock signal and the workpiece surface is scanned with the pulsed laser beam in the one-dimensional direction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
