| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrier system and a control method thereof to make it possible to suppress a decrease of operation rate of each manufacturing device and an increase of lead time. <P>SOLUTION: A carrier system comprises: a specific manufacturing device determination part which specifies a manufacturing device having the maximum number of untreated cassettes stored in a storage cabinet of a plurality of the manufacturing devices 11 to 63, and determines the specified manufacturing device to be a specific manufacturing device when the number of the cassettes is not less than a threshold value; a vacant carrier truck control part which designates one of either of two vacant carrier trucks mounting no cassette among a plurality of carrier trucks 71 to 79 to be a special truck for collection, and makes the other stand by at a predetermined waiting place as a special truck for carry-in of the specific manufacturing device; and a carrier instruction part which makes the special truck for collection collect a treated cassette treated in the specific manufacturing device, and makes the special truck for carry-in carry a untreated cassette stored in the storage cabinet in the specific manufacturing device. <P>COPYRIGHT: (C)2012,JPO&INPIT |
