| 发明名称 |
COMPOUND, COPOLYMER INCLUDING THE COMPOUND, AND RESIST PROTECTIVE COAT COMPOSITION CONTAINING THE COPOLYMER |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resist protective coat composition having various superior characteristics. <P>SOLUTION: A resist protective coat composition comprising a copolymer having a repeating unit represented by Chemical formula 1-a having a compound represented by Chemical formula 1 as a monomer component thereof. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012009866(A) |
申请公布日期 |
2012.01.12 |
| 申请号 |
JP20110139999 |
申请日期 |
2011.06.24 |
| 申请人 |
KOREA KUMHO PETROCHEM CO LTD |
发明人 |
JU HYUN-SAN;PARK JU-HYEON;HAN JUN-HEE;LIM HYUN-SUN |
| 分类号 |
H01L21/027;C07C69/653;C08F20/26;G03F7/11 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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