| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an autofocusing device for a microscope and a suitable autofocus aperture diaphragm. <P>SOLUTION: An autofocus aperture diaphragm (5, 6) in a triangulating autofocusing device (21) for a microscope (40) includes at least one diaphragm aperture (3, 4), is capable of limiting a measuring beam pencil (34) used for autofocusing with the diaphragm aperture (3, 4) and extending in the direction of the optical axis (18) of the autofocusing device (21) in the cross section. The diaphragm aperture (3, 4) of the autofocus aperture diaphragm (5, 6) is disposed at a decentered position with a space from the optical axis (18) of the autofocusing device (21), and a decentered autofocus measuring beam (36) can be generated with the diaphragm aperture (3, 4) in one half of the cross section (17) of the measuring beam pencil (34). <P>COPYRIGHT: (C)2012,JPO&INPIT |
