| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a narrow band laser having a stabilized spectral purity width E95, by controlling the spectral purity width E95 in a broad control range hardly affecting the control of a center wavelength. <P>SOLUTION: A wavefront regulator 32 is provided on the output side of an optical resonator, that is, on the output coupler 31 side. Light generated by a laser chamber 10 passes through the wavefront regulator 32 from the laser chamber 10 side, and reaches the output coupler 31. By the adjustment of a distance between a concave lens 33 and a convex lens 34 to obtain a desired spectral purity width E95, the wavefront regulator 32 adjusts so as to have a desired wavefront. <P>COPYRIGHT: (C)2012,JPO&INPIT |
