| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent deformation of a diaphragm due to a thermal stress caused by a coefficient of thermal expansion of a sensor body being an aggregate of a fixed electrode, sealing glass, etc., and a coefficient of thermal expansion of a fixing member such as a flange part. <P>SOLUTION: A pressure sensor comprises: a sensor body 2 on which a fixed electrode 21 is fixed; a diaphragm structure 3 for forming a sealed space between the sensor body 2; and a fixing member 4 which is joined to the diaphragm structure 3 so as to surround a pressure receiving section of the diaphragm structure 3 and guides fluid to the pressure receiving section. The diaphragm structure 3 includes a plate shaped diaphragm body 31, and a first ring member 32, and a second ring member 33 which are respectively arranged at both peripheral side edges of the diaphragm body 31 and have known coefficients of thermal expansion. <P>COPYRIGHT: (C)2012,JPO&INPIT |
