CYLINDER SURFACE TREATMENT FOR MONOCHLOROSILANE

摘要

PROBLEM TO BE SOLVED: To provide a container and method for storing monochlorosilane in a stable condition without degradation thereof.

SOLUTION: The container has an internal surface selected from the group of : (a) a surface resulting from mechanical polishing; (b) a surface resulting from electropolishing; (c) a surface resulting from formation of a hydrophobic protecting layer of organic molecules; (d) a surface resulting from providing an internal surface of stainless steel; (e) a surface resulting from providing an internal surface of aluminum; (f) a surface resulting from providing an internal surface of nickel; (g) a surface resulting from a polymer coating; (h); a surface having a silicon oxide coating; (i) a surface having a crystalline carbon layer molecularly bonded to the metal; (j) a surface having a passivation layer of a metal fluoride; (k) a surface having a passivation layer of silane bonded to metal by exposure to silanes; and (l) a surface having de-activating hydroxy groups.

COPYRIGHT: (C)2012,JPO&INPIT