发明名称 THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME
摘要 A thin film transistor includes a multi-coaxial silicon nanowire unit including a plurality of coaxial silicon nanowires on a substrate, the multi-coaxial silicon nanowire unit including a central portion and end portions of the central portion; a gate electrode on the central portion; and a source electrode and a drain electrode on the respective end portions, respectively, so as to electrically connect to the multi-coaxial silicon nanowire unit.
申请公布号 US2012009707(A1) 申请公布日期 2012.01.12
申请号 US201113240391 申请日期 2011.09.22
申请人 CHAE GEE-SUNG;PARK MI-KYUNG;LG DISPLAY CO., LTD. 发明人 CHAE GEE-SUNG;PARK MI-KYUNG
分类号 H01L21/336;H01L33/20 主分类号 H01L21/336
代理机构 代理人
主权项
地址