发明名称 ROTARY TARGET BACKING TUBE BONDING ASSEMBLY
摘要 A rotary sputtering target bonded to a backing tube such that the bonding material is applied only proximate the ends of the rotary sputtering target and is also between the target and the backing tube to form a gap between the rotary sputtering target and the backing tube and a device for bonding a rotary sputtering target to a backing tube.
申请公布号 US2012006680(A1) 申请公布日期 2012.01.12
申请号 US201113179825 申请日期 2011.07.11
申请人 WITYAK GEORGE MICHAEL;COX LUTHER WILBURN 发明人 WITYAK GEORGE MICHAEL;COX LUTHER WILBURN
分类号 C23C14/50;B29C65/02;B32B37/06;C23C14/34 主分类号 C23C14/50
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