发明名称 |
ROTARY TARGET BACKING TUBE BONDING ASSEMBLY |
摘要 |
A rotary sputtering target bonded to a backing tube such that the bonding material is applied only proximate the ends of the rotary sputtering target and is also between the target and the backing tube to form a gap between the rotary sputtering target and the backing tube and a device for bonding a rotary sputtering target to a backing tube. |
申请公布号 |
US2012006680(A1) |
申请公布日期 |
2012.01.12 |
申请号 |
US201113179825 |
申请日期 |
2011.07.11 |
申请人 |
WITYAK GEORGE MICHAEL;COX LUTHER WILBURN |
发明人 |
WITYAK GEORGE MICHAEL;COX LUTHER WILBURN |
分类号 |
C23C14/50;B29C65/02;B32B37/06;C23C14/34 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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