发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
摘要 <p>The disclosed semiconductor device has: a second active region (10b) that is formed on a semiconductor substrate (10) comprising silicon, and that comprises an element-isolating region (11) encircling the periphery thereof; and a gate electrode (14) formed on said second active region (10b) and element-isolating region (11) with a gate insulating film (13) interposed therebetween. At the second active region (10b), a p-type silicon mixed crystal layer (21) is formed at a recessed region (19c) comprising the region of the two sides of the gate electrode (14) being excavated, and the top end (21b) of the position of contact of said p-type silicon mixed crystal layer (21) contacting the element isolating region (11) is lower than the lower portion of the gate insulating layer (13) at the upper surface of the second active region (10b).</p>
申请公布号 WO2012004911(A1) 申请公布日期 2012.01.12
申请号 WO2011JP01583 申请日期 2011.03.17
申请人 PANASONIC CORPORATION;KUTSUNAI, TOSHIE;ITO, SATORU 发明人 KUTSUNAI, TOSHIE;ITO, SATORU
分类号 H01L21/336;H01L21/8238;H01L27/092;H01L29/78 主分类号 H01L21/336
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