MICROELECTROMECHANICAL SENSOR AND OPERATING METHOD FOR A MICROELECTROMECHANICAL SENSOR,申请号EP20070786628-传众专利搜索

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发明名称	MICROELECTROMECHANICAL SENSOR AND OPERATING METHOD FOR A MICROELECTROMECHANICAL SENSOR
摘要
申请公布号	EP2062009(B1)	申请公布日期	2012.01.11
申请号	EP20070786628	申请日期	2007.08.08
申请人	NORTHROP GRUMMAN LITEF GMBH	发明人	SPAHLINGER, GUENTER
分类号	G01C19/56;G01C19/5712	主分类号	G01C19/56
代理机构		代理人
主权项
地址

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