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发明名称
CHARGED-PARTICLE BEAM WRITING METHOD AND CHARGED-PARTICLE BEAM WRITING APPARATUS
摘要
申请公布号
KR101104534(B1)
申请公布日期
2012.01.11
申请号
KR20090024691
申请日期
2009.03.24
申请人
发明人
分类号
H01L21/027;G03F1/76;G03F1/78;G03F7/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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