| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve the long life of the device and the increase and high speed (making the device high resonant frequency) of the displacement of a movable part, and improve the handling property and the mounting property of a component to the movable part or fixing property of the device. <P>SOLUTION: The piezoelectric/electrostrictive device 10A includes a pair of thin plate parts 16a, 16b facing each other; a movable part 20; and a fixing part 22 for supporting these thin plate parts 16a, 16b and the movable part 20. The piezoelectric/electrostrictive elements 24a, 24b are disposed on at least one of the thin plate parts 16a, 16b among the pair of thin plate parts 16a, 16b, and a hole part 12 is formed by both inner walls of the pair of thin plate parts 16a, 16b, an inner wall 20a of the movable part 20, and an inner wall 22a of the fixing part 22. In the piezoelectric/electrostrictive device described above the pair of thin plate parts 16a, 16b are made of metal. <P>COPYRIGHT: (C)2008,JPO&INPIT |
