| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal microscope, capable of capturing the inner peripheral surface of a notched part, such as a notch formed in the peripheral edge of a semiconductor wafer and of a groove, etc., as a high-resolution image. SOLUTION: A two-dimensional scanning beam is projected toward the end edge (2) of the semiconductor wafer (1) via an objective lens system (29). The reflected light from the semiconductor wafer is condensed by the objective lens system (29), then made incident on a linear image sensor (32), and then the output signal is supplied to a signal processor (40). The two-dimensional image signal of the end edge of the semiconductor wafer is outputted from the signal processor (40). The notched parts (60a and 60b) are formed on both sides of the leading end side of the objective lens system across the optical axis. By forming the notched parts, the leading end part of the objective lens system enters the inside of the notch (4), formed in the wafer without colliding with the wafer, and then the image of the inner peripheral surface of the notch is imaged. COPYRIGHT: (C)2007,JPO&INPIT |
