| 摘要 |
The invention is aimed to provide a membrane attaching method for preventing fine powder or dust from falling on the substrate surface without reduced yield. The scheme for solving the problem is that: preparing a front adsorption plate corresponding to the membrane front portion and an adsorption plate with respect to the membrane area outside the membrane front portion, maintaining the substrate in vertical direction to incline in a specified angle toward the adsorption plate through making the adsorption plate vertical, conveying the pressing roller to the underside of the vertical direction at the state of clamping the pressing roller to the membrane front portion, and attaching the membrane to the substrate by using the pressing roller from the front to the end of the membrane while maintaining the membrane and the substrate in a constant angle. |
