SILOXANE BASED-LOW DIELECTRIC CONSTANT THIN FILMS USING CYCLO-SILOXANE AND A METHOD FOR PREPARING THE SAME

摘要

PURPOSE: A Siloxane based-low dielectric film using cyclic silsesquioxane is provided to have excellent physical property, thermal stability and crack resistance, and to have high modulus and hardness maintaining excellent low dielectric property. CONSTITUTION: A Siloxane based-low dielectric film using cyclic silsesquioxane comprises a step of manufacturing silsesquioxane sol by sol-gel method by adding the stereoisomer of multi-reactive cyclic silsesquioxane into alkoxy siloxane; a step of manufacturing coating liquid containing the silsesquioxane sol and solvent; and a step of spreading the coating liquid and hardening. The silsesquioxane polymer matrix uses as a precursor for the manufacturing of the dielectric film. The silsesquioxane polymer matrix is the silsesquioxane sol manufactured by the adding of the multi-reactive cyclic silsesquioxane into the alkoxysilane.