发明名称 |
ROTOR OPTICS IMAGING METHOD AND SYSTEM WITH VARIABLE DOSE DURING SWEEP |
摘要 |
<p>The technology disclosed relates to methods and devices that compensate for displacements in a pattern or deformations of a workpiece. In particular, this relates to using timing to compensate for displacements along a first axis along the scanning direction while using resampling, interpolation or a similar method to compensate for displacements along a second axis that is substantially orthogonal to the first axis. The scanning direction may be an actual direction of movement of the scanning head or it may be a direction perpendicular to an orientation of an image projected onto a workpiece.</p> |
申请公布号 |
EP2404222(A1) |
申请公布日期 |
2012.01.11 |
申请号 |
EP20100712721 |
申请日期 |
2010.03.05 |
申请人 |
MICRONIC MYDATA AB |
发明人 |
SANDSTROEM, TORBJOERN;ASKEBJER, PER |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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