LASER BEAM IRRADIATION APPARATUS AND SUBSTRATE SEALING APPARATUS COMPRISING THE SAME

摘要

PURPOSE: A laser beam irradiating apparatus and a substrate sealing apparatus including the same are provided to prevent bad sealing by eliminating alignment deformation between an optical tube and the sealing path of a sealing part. CONSTITUTION: An optical fiber driving adjustment part(150) comprises first and second piezoelectric transducers(152,153) and a pair of zero point adjustment parts(154,155). The first and second piezoelectric transducers and a pair of zero point adjustment parts are supported by the fixing frame(151) of a ring shape. Optical fiber transfers laser beam which is oscillated in a laser oscillator. The end part of the optical fiber is accepted in an optical tube. The optical tube is straightly driven on a flat surface which crosses to an irradiation direction of the laser beam. The first and second piezoelectric transducers are located between the optical tube and the end part of the optical fiber.