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发明名称
Semiconductor device manufacturing method
摘要
申请公布号
EP1341218(B1)
申请公布日期
2012.01.11
申请号
EP20020257693
申请日期
2002.11.06
申请人
FUJITSU SEMICONDUCTOR LIMITED
发明人
KIKUCHI, HIDEAKI;KOMURO, GENICHI
分类号
H01L21/02;H01L21/302;H01L21/3065;H01L21/311;H01L21/3213;H01L21/8246;H01L27/105;H01L27/115
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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