DIAMOND TOOL HAVING STRONG CORROSION- RESISTANCE FOR CMP

摘要

PURPOSE: A diamond tool for chemical mechanical polishing with strong corrosion-resistance is provided to effectively prevent a bonding layer from becoming corroded due to corrosive slurry. CONSTITUTION: A diamond tool for chemical mechanical polishing with strong corrosion-resistance comprises first, second, and third coating layers. The first coating layer is plated with a nickel alloy and is formed on a nickel bonding layer. The second coating layer is plated with a palladium alloy and is formed on the first coating layer. The third coating layer is plated with chrome and is formed on the second coating layer.