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发明名称
Ion beam stabilization
摘要
Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
申请公布号
US8093563(B2)
申请公布日期
2012.01.10
申请号
US20090548764
申请日期
2009.08.27
申请人
RAHMAN FHM-FARIDUR;FARKAS, III LOUIS S.;NOTTE, IV JOHN A.;CARL ZEISS NTS, LLC
发明人
RAHMAN FHM-FARIDUR;FARKAS, III LOUIS S.;NOTTE, IV JOHN A.
分类号
H01J3/14
主分类号
H01J3/14
代理机构
代理人
主权项
地址
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