| 摘要 |
PURPOSE: A light irradiation apparatus is accurately provided to detect the discharge of an excimer by arranging an illuminance sensor to the central part of an excimer lamp. CONSTITUTION: An illuminance sensor(10) receives emission light of an excimer lamp. The illuminance sensor is arranged to face the end part of the longitudinal direction of the excimer lamp. The illuminance sensor slopes a light receiving surface to the central part of the excimer lamp. A partition wall(5) divides a process area in a housing which accepts the excimer lamp. The excimer lamp(3) is extended over the process area.
|
