发明名称 |
System and method of image processing, and scanning electron microscope |
摘要 |
A scanning electron microscope comprises an image processing system for carrying out a pattern matching between a first image and a second image. The image processing system comprises: a paint-divided image generator for generating a paint divided image based on the first image; a gravity point distribution image generator for carrying out a smoothing process of the paint divided image and generating a gravity point distribution image; an edge line segment group generation unit for generating a group of edge line segments based on the second image; a matching score calculation unit for calculating a matching score based on the gravity point distribution image and the group of edge line segments; and a maximum score position detection unit for detecting a position where the matching score becomes the maximum. |
申请公布号 |
US8094920(B2) |
申请公布日期 |
2012.01.10 |
申请号 |
US20060520800 |
申请日期 |
2006.09.14 |
申请人 |
SUGIYAMA AKIYUKI;SHINDO HIROYUKI;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
SUGIYAMA AKIYUKI;SHINDO HIROYUKI |
分类号 |
G06K9/00;G06K9/36;G06K9/46 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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