发明名称 |
System and method for removing organic residue from a charged particle beam system |
摘要 |
A system and method for removing an organic residue from a charged particle beam system includes a conduit that is coupled to the column and is for adding oxygen to the column. A heater is coupled to the column and is for increasing the temperature in the column. A pump is coupled to the column and is for removing a gas from the chamber, wherein the gas is a byproduct of a chemical reaction of the organic residue and the oxygen. |
申请公布号 |
US8092641(B1) |
申请公布日期 |
2012.01.10 |
申请号 |
US20050199898 |
申请日期 |
2005.08.08 |
申请人 |
XIAO HONG;HERMES-MICROVISION, INC. |
发明人 |
XIAO HONG |
分类号 |
B08B7/00 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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