Nitride semiconductor device and method for producing nitride semiconductor device

摘要

This nitride semiconductor device comprises: an n-type first layer made of a group III nitride semiconductor; a p-type second layer made of a group III nitride semiconductor layer provided on the first layer; and an n-type third layer made of a group III nitride semiconductor with a p-type impurity content of not more than 1×1018 cm−3 provided on the second layer.