POWER SUPPLYING MEANS HAVING SHIELDING MEANS FOR SHIELDING FEEDING LINE AND APPARATUS FOR TREATING SUBSTRATE INCLUDING THE SAME

摘要

PURPOSE: A power supply means and a substrate processing apparatus including the same are provided to prevent the divergence of an electric field to the outside of a feeding line by installing a shielding means which surrounds the feeding line. CONSTITUTION: A processing chamber offers a reaction space by the bonding of a chamber body and a chamber lid(112a). A source electrode(114) is installed inside the processing chamber. An RF(Radio Frequency) power source supplies RF power to the source electrode. A feeding line(160) interlinks the source electrode and the RF power. A shielding means(150) shields an electric field of the feeding line by protecting the feeding line. A space is formed between the feeding line and the shielding means. A circulating means circulates the air in the space. A ground conductor(156) interlinks the shielding means and the chamber lid. The source electrode comprises a plurality of plasma source electrodes which is combined with the chamber lid. A plurality of plasma source electrodes is connected in parallel with the RF power source.