CERIA SLURRY FOR POLISHING SEMICONDUCTOR THIN LAYER AND PREPARATION THEREOF,申请号KR20050089681-传众专利搜索

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发明名称	CERIA SLURRY FOR POLISHING SEMICONDUCTOR THIN LAYER AND PREPARATION THEREOF
摘要
申请公布号	KR101103748(B1)	申请公布日期	2012.01.06
申请号	KR20050089681	申请日期	2005.09.27
申请人		发明人
分类号	H01L21/304;C09K3/14	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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