A MANUFACTURING METHOD OF A HIGH PURITY ELECTROSTATIC CHUCK USING GLASS BONDING PROCESS AND AN ELECTROSTATIC CHUCK USING THE SAME,申请号KR20090097810-传众专利搜索

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发明名称	A MANUFACTURING METHOD OF A HIGH PURITY ELECTROSTATIC CHUCK USING GLASS BONDING PROCESS AND AN ELECTROSTATIC CHUCK USING THE SAME
摘要
申请公布号	KR101103821(B1)	申请公布日期	2012.01.06
申请号	KR20090097810	申请日期	2009.10.14
申请人		发明人
分类号	H01L21/687	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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