| 摘要 |
<P>PROBLEM TO BE SOLVED: To produce a chromium-based hard coating, in which deterioration in mold releasability is reduced, by a PVD method. <P>SOLUTION: A chromium layer is formed on surfaces of subjects 21, 22 to be deposited by generating an arc discharge between chromium evaporation sources 13a, 14a and anodes 13b, 14b while applying a bias voltage on the subjects 21, 22 to be deposited in a vacuum chamber 10a. A chromium nitride layer is formed on the chromium layer by generating arc discharge between the chromium evaporation sources 13a, 14a and the anodes 13b, 14b while supplying nitrogen into the vacuum chamber 10a. A chromium carbonitride layer is formed on the chromium nitride layer by generating arc discharge between the chromium evaporation sources 13a, 14a and the anodes 13b, 14b while supplying nitrogen and carbon into the vacuum chamber 10a. An amorphous chromium carbide layer is formed on the chromium carbonitride layer by generating arc discharge between the chromium evaporation sources 13a, 14a and the anodes 13b, 14b while supplying carbon into the vacuum chamber 10a. <P>COPYRIGHT: (C)2012,JPO&INPIT |
