发明名称 COMPONENT PACKAGING SYSTEM AND PANEL TRANSFER METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a component packaging system and a panel transfer method in which a panel is hard to fall from a panel holding member even when anomalous pressure occurs in a vacuum pressure supply line during transportation of a panel by a panel transfer apparatus, and even if a panel falls, the panel and a component packaging apparatus is hard to be broken. <P>SOLUTION: The component packaging system comprises a manometer 53 for detecting anomalous pressure in vacuum pressure supply lines 48 when vacuum pressure from a vacuum pressure supply source 47 is supplied into each suction part duct 46 via the vacuum pressure supply lines 48 through a first valve 51, two second valves 52 for sealing all of the suction part ducts 46 when anomalous pressure in the vacuum pressure supply lines 48 is detected by the manometer 53 and a panel holding member transfer arm 42 for transferring a panel holding member 43 when all of the suction part ducts 46 are sealed by the two second valves 52 in such a way as to transfer a panel 2 held by the panel holding member 43 to a position above either one of two neighboring work tables 22. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012004337(A) 申请公布日期 2012.01.05
申请号 JP20100137957 申请日期 2010.06.17
申请人 PANASONIC CORP 发明人 MIMURA YOSHIHIRO;OKADA YASUHIRO
分类号 H01L21/60 主分类号 H01L21/60
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