| 摘要 |
PURPOSE: A helium collecting system for a processing chamber is provided to reuse helium by re-collecting the helium which is not consumed in a fluid path groove of an electrostatic chuck, thereby reducing manufacturing costs by minimizing the consumption of expensive helium. CONSTITUTION: A processing chamber(10) comprises a lift pin which supports a wafer and an electrostatic chuck(12). A fluid path groove is arranged on the upper surface of the electrostatic chuck. A re-collection circuit part(20) comprises an MFC(Mass Flow Controller)(23) which controls a flow rate of helium, a re-collection tank(22), and a pump(21). A main supply tank(40) stores the helium in order to supply to the re-collection circuit part. A main valve(50) is installed in a line connecting the main supply tank and re-collection circuit part.
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