MOLDING DIE FOR OPTICAL DEVICE HAVING ANTIREFLECTIVE STRUCTURE, AND OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To achieve a molding die for optical device having an antireflective structure of nano-order microscopic uneven plane on a substrate surface, and the optical device having the antireflective structure.

SOLUTION: The molding die 1 for optical device having a microscopic uneven plane (antireflective structure die plane)1' on a surface of substrate 2 is produced by a process comprising forming one or more etching transfer layers 3 on a substrate 2; forming thin film 4 for formation of semispherical microparticles on the etching transfer layers 3; causing the thin film 4 to undergo aggregation, or decomposition, or nucleation of the material by the use of any of thermal reaction, photoreaction and gas reaction or a combination of these reactions to form multiple semispherical island-like microparticles 5; and using the multiple island-like microparticles 5 as a protective mask, carrying out sequential etching of the etching transfer layers 3 and substrate 2 by reactive gas to thereby form a conical pattern on the microscopic surface of the substrate 2.

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