MANUFACTURING METHOD OF OXIDE SUPERCONDUCTING THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconducting thin film with sufficiently excellent superconducting characteristics attained by sintering after making a close-grained calcined film with a generation of voids curbed in calcination of a coating film of a MOD solution.

SOLUTION: A manufacturing method of an oxide superconducting thin film used for manufacturing a superconducting wire rod by a coating thermal decomposition method using an metal organic compound as a raw material comprises: a coating film making step in which a coating film is made by coating on a substrate with a solution of the metal organic compound; a calcination heat treatment step in which a calcined film is made by thermal decomposition and removal of an organic constituent contained in the metal organic compound of the coating film; and a sintering heat treatment step in which the oxide superconducting thin film is made by crystallization of the calcined film. In the calcination heat treatment step, the substrate is heated and the organic constituent is thermally decomposed and removed by heat conducted from the heated substrate.

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