| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration type force detecting sensor element that is simple in structure and quick in response, a vibration type force detecting sensor using the same, and a vibration type force detecting sensor device using the same. <P>SOLUTION: A vibration type force detecting sensor element 1 comprises a supporting part 12, a vibrating piece 10 having a vibrating part 14 on whose both main faces excitation electrodes 15a and 15b are provided, and a mass part 2 whose base part 3 and weight part 5 are connected by an elastic beam part, wherein the vibrating piece 10 is joined onto the mass part 2 via a joining member 96 in a manner where the surface of the vibrating part 14 opposing a main face 5a and the main face 5a opposing the weight part 5 are cantilevered substantially in parallel to each other with a gap (g) in-between, a vibration type force detecting sensor 20 has in a package 30 the vibration type force detecting sensor element 1 joined via the joining member 96, and onto the package 30 a lid 40 is joined via a seal ring 39, and an internal space T formed by the package 30 and the lid 40 is filled with gas, such as argon gas. <P>COPYRIGHT: (C)2012,JPO&INPIT |
