| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an abrasive composition and a method for polishing a magnetic disk substrate improving the polishing rate and reducing adhesion of alumina caused by intermediate alumina added aiming reducing the waviness and reducing the roll-off. <P>SOLUTION: The abrasive composition includes an abrasive material, the intermediate alumina, acid, an oxidizing agent and water, and further includes an alumina adhesion reducing agent which is at least one kind selected from (i) an organic phosphonic acid chelate compound having two or more phosphonic acid groups, (ii) a high polymer anionic surface active agent with 500-150,000 mol.wt. having repeating units in a molecule, (iii) an organic phosphoric acid ester-type anionic surface active agent having polyoxyalkylene groups of a predetermined structure, and reduces adhesion of the alumina to an object to be polished. <P>COPYRIGHT: (C)2012,JPO&INPIT |
