| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the adhesion of fine foreign matter to a processing workpiece held inside a cassette by improving the controllability of flow velocity of a local air flow within a casing of a mini environment device. <P>SOLUTION: The mini environment device includes: a casing 61 the inside of which is kept in a clean atmosphere; a fan filter unit including a fan 2 and a filter 3 to generate a down flow 8; an opening 9 for discharging the down flow 8; a connection part 62 of a cassette 4 for holding the processing workpiece 6; and an air flow generator 12 including a drive unit which is installed inside the casing 61 to locally accelerate the down flow 8. <P>COPYRIGHT: (C)2012,JPO&INPIT |
