| 摘要 |
Observation fields of an electron microscope image and an optical magnifying observation image are smoothly switched. A magnifying observation apparatus includes: a pair of end-face plates closes end faces of a body portion; an electron beam imaging device mounted on a first position of a cylindrical shaped outer surface of the body portion; an optical imaging device mounted on a second position being different from the first position in the outer surface; a rotating device that rotates the both imaging devices along the outer surface such that a distance from each of the both imaging devices to a common rotation axis of the both imaging devices is kept constant and optical axes of the both imaging devices are oriented toward the rotation axis; a specimen stage that is disposed in the chamber, and arranged to a position that is substantially the same to a height of the rotation axis.
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