| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus and an inspection method capable of minimizing a measurement error and accurately measuring a stage position. <P>SOLUTION: A measuring system 122 measures a position of an XYθ stage 102 with a laser interferometer 201 and a linear scale 202. A measured value measured by the laser interferometer 201 is converted to position component data on a position calculation part 203 and then passes through a low pass filter 204. A measured value measured by the linear scale 202 is converted to position component data on the position calculation part 203 and then passes through a high pass filter 205. The data passing through the low pass filter 204 and the data passing through the high pass filter 205 are added and combined on an adder 206. <P>COPYRIGHT: (C)2012,JPO&INPIT |
