METHOD AND APPARATUS FOR MANUFACTURING OXIDE SUPERCONDUCTING THIN FILM WIRE ROD

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing an oxide superconducting wire rod having steady superconducting characteristics with high productivity by achieving a high degree of cleaning effectiveness with short-time cleaning of an oriented metallic substrate before a coating film making step.

SOLUTION: A manufacturing method of an oxide superconducting thin film wire rod by forming an oxide superconducting thin film by a coating thermal decomposition method with an atmosphere furnace using a metal organic compound as a raw material comprises: a substrate cleaning step in which the surface of an oriented metallic substrate is cleaned by UV irradiation; a coating film making step in which a coating film is made by coating on the oriented metallic substrate cleaned in the substrate cleaning step with a solution of the metal organic compound; a calcination heat treatment step in which a calcined film is made by thermal decomposition and removal of an organic constituent contained in the metal organic compound of the coating film; and a sintering heat treatment step in which the oxide superconducting thin film is made by crystallization of the calcined film.

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