COATED GRAPHITE ARTICLE AND REACTIVE ION ETCH MANUFACTURING AND REFURBISHMENT OF GRAPHITE ARTICLE
摘要
In accordance with an embodiment of the invention, there is provided a coated graphite article. The article comprises graphite; and a conductive coating overlaying at least a portion of the graphite. The conductive coating comprises a through-thickness resistance of less than about 50 ohms as measured through the thickness of the graphite and the conductive coating. In accordance with another embodiment of the invention, there is provided a method for manufacturing a graphite article comprising a conductive coating. The method comprises treating graphite of the article with a reactive ion etch process; and after treating the graphite with the reactive ion etch process, applying the conductive coating over at least a portion of the graphite. In a further embodiment according to the invention, there is provided a method for refurbishing a graphite article comprising graphite and an overlaying conductive coating. The method comprises removing the overlaying conductive coating of the graphite article with a reactive ion etch process; and applying a new conductive coating over at least a portion of the graphite.
申请公布号
WO2011133417(A3)
申请公布日期
2012.01.05
申请号
WO2011US32662
申请日期
2011.04.15
申请人
ENTEGRIS, INC.;COOKE, RICHARD, A.;GUNDA, NILESH;DONNELL, STEVEN;LIU, YAN
发明人
COOKE, RICHARD, A.;GUNDA, NILESH;DONNELL, STEVEN;LIU, YAN