| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heater unit with a shaft that improves a temperature distribution of a heater by compounding materials differing in thermal conductivity. <P>SOLUTION: The heater unit 100 with the shaft includes a heater plate 1 and a shaft portion 2 supporting the heater plate 1. The heater plate 1 includes a flat plate-like base portion 3 joined to the shaft portion 2, a first plate portion 4 disposed on an outer peripheral portion of the base portion 3, and a second plate portion 5 selected from materials higher in thermal conductivity than the material constituting the first plate portion 4, and disposed so that an inner peripheral side of the first plate portion 4 is buried. The first plate portion 4 and the second plate portion 5 are stacked on the base portion 3 by a cold spray method. <P>COPYRIGHT: (C)2012,JPO&INPIT |
