| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inertial sensor which can improve mechanical characteristics such as impact, reduces the influence of temperature characteristics and can accurately detect acceleration or the like. <P>SOLUTION: An acceleration sensor 1 has a beam-shaped extended piezoelectric body substrate 10. The piezoelectric body substrate 10 has first and second groove parts 141 and 142. A portion between the first and second groove parts 141 and 142 is made to be a weight 12. Both of end parts 131 and 132 of the piezoelectric body substrate 10 are supported. A surface 11a of the piezoelectric body substrate 10 has first and second SAW elements 21 and 22 for oscillating a surface acoustic wave formed thereon. The first and second SAW elements 21 and 22 have the same structure, and are formed so as to oscillate a surface acoustic wave having the same resonance frequency in a state in which the acceleration is not applied to the weight 12. A detection circuit 61 for detecting the differential value of the respective frequencies of the respective surface acoustic waves oscillated by oscillation circuits 31 and 32 is provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
