| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacity type inertial force sensor capable of detecting the inertial force of a wide range while suppressing deterioration of its detection precision and an increase in physical constitution in the direction along the lower surface (or the upper surface ) of a movable electrode. <P>SOLUTION: The capacity type inertial force sensor includes, as a fixed electrode disposed opposite to a movable electrode, a first fixed electrode which is disposed opposite to the side surface perpendicular to the displacement direction in a movable electrode so that an opposed distance to the movable electrode changes in accordance with displacement of the movable electrode; and a second fixed electrode which is disposed opposite to at least one of the upper surface and the lower surface of the movable electrode opposing the first fixed electrode so that an opposed area to the movable electrode changes in accordance with the displacement of the movable electrode. <P>COPYRIGHT: (C)2012,JPO&INPIT |
