| 摘要 |
<P>PROBLEM TO BE SOLVED: To speed up the collection or operational processing of the beam data from a multichannel type monitor. <P>SOLUTION: This data collection device includes a multiplexer 13 for selecting one of a plurality of the channel data based on the analogue signals from a multichannel type sensor device 22, an A/D converter 14 for converting the channel data selected by the multiplexer 13 to A/D conversion data, a channel selection circuit 16 for controlling the multiplexer 13 and the A/D converter 14, and a data collecting operational circuit 17 for operating the state of charged corpuscular beam 1 on the basis of a plurality of the A/D conversion data. The channel selection circuit 16 has a channel setting register 18 for storing the data of the selection channel outputted to the data collecting operational circuit 17 of a plurality of the detection channels of the multichannel type sensor device 22 to successively output the A/D conversion data of the selection channel to the data collecting operational circuit 17 on the basis of the data of the selection channel. <P>COPYRIGHT: (C)2012,JPO&INPIT |
